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Elementry
ALL PRODUCTS
APPLICATIONS
Capacitor high-k
Metal gate high-k
DPT ULTO
Gap fill SiO2
Gate SiO2/SiN
Capacitor electrode
Barrier metal
Interconnection metal
Contact metal
DPT Hard mask SiON
DPT Hard mask ACL
ELEMENTRY
Al
Hf
Ru
Ti
C
Mo
Si
V
Co
Ni
Sn
W
Ge
Pt
Ta
Zn
Zr
Al
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TMA
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DMEAA
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MPA
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DMAH
C
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1-hexene
Co
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CCTBA
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CpCo(CO)2
Hf
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TEMAHf
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Hf(OtBu)4
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CpHf
Ni
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NiEtCp2
Ru
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MPA
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TBTEMTa
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RuEtCp2
Si
