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Elementry
ALL PRODUCTS
APPLICATIONS
Capacitor high-k
Metal gate high-k
DPT ULTO
Gap fill SiO2
Gate SiO2/SiN
Capacitor electrode
Barrier metal
Interconnection metal
Contact metal
DPT Hard mask SiON
DPT Hard mask ACL
ELEMENTRY
Al
Hf
Ru
Ti
C
Mo
Si
V
Co
Ni
Sn
W
Ge
Pt
Ta
Zn
Zr
Al
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TMA
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DMEAA
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MPA
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DMAH
C
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1-hexene
Co
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CCTBA
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CpCo(CO)2
Hf
Quick View
TEMAHf
Quick View
Hf(OtBu)4
Quick View
CpHf
Ni
Quick View
NiEtCp2
Ru
Quick View
MPA
Quick View
TBTEMTa
Quick View
RuEtCp2
Si
Quick View
3TMS
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4TMS
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BTBAS
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TDMAS
Quick View
HCDS
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BDEAS
Quick View
SiCl4
Quick View
DIPAS
Ta
Quick View
MPA
Quick View
CpTa
Quick View
TBTEMTa
Quick View
TBTDETa
Ti
Quick View
Cp*Ti(OMe)3
Quick View
TiCl4
Quick View
TDMAT
W
Quick View
TBDMW
Zr
Quick View
CpZr
Quick View
TEMAZr
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