TBTEMTa
Chemincal Name
(t-butylimido)tris(ethylmethylamido) tantalum
Chemincal Formula
C13H33N4Ta
Formula Weight(g/mo)
426.38
Melting Point(℃)
< 0
Boiling Point(℃/torr)
88 / 0.1
Vapor pressure(torr/℃)
0.5 / 100
Phase
Light Yellow liquid
Density(g/ml)@25℃
1.30
NFPA Rating(Health/Flammability/Instablility)
2 / 3 / 3
CAS. NO
511292-99-2
