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Applicaitons
Applicaitons
Elementary
Elementary
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APPLICATIONS
ALL PRODUCTS
APPLICATIONS
Capacitor high-k
Metal gate high-k
DPT ULTO
Gap fill SiO2
Gate SiO2/SiN
Capacitor electrode
Barrier metal
Interconnection metal
Contact metal
DPT Hard mask SiON
DPT Hard mask ACL
ELEMENTRY
Al
Hf
Ru
Ti
C
Mo
Si
V
Co
Ni
Sn
W
Ge
Pt
Ta
Zn
Zr
Capaitor high-k
Quick View
TMA
Quick View
Cp*Ti(OMe)3
Quick View
CpHf
Quick View
TEMAHf
1
2
Metal high-k
Quick View
TMA
Quick View
TBTDETa
Quick View
CpHf
Quick View
TEMAHf
1
2
DPT ULTO
Quick View
HCDS
Quick View
BDEAS
Quick View
DIPAS
1
Gap fill SiO2
Quick View
DIPAS
Quick View
TDMAS
Quick View
BDEAS
1
Gate SiO2/SiN
Quick View
DIPAS
Quick View
BTBAS
Quick View
TDMAS
Quick View
BDEAS
1
Capacitor electrode
Quick View
TiCl4
Quick View
TDMAT
Quick View
RuEtCp2
1
Barrier metal
Quick View
TBTDETa
Quick View
RuEtCp2
Quick View
CpTa
Quick View
TBTEMTa
1
2
Interconnection metal
Quick View
DMEAA
Quick View
MPA
Quick View
DMAH
1
Contact metal
Quick View
CCTBA
Quick View
CpCo(CO)2
Quick View
TBDMW
Quick View
NiEtCp2
1
DPT Hard mask SiON
Quick View
3TMS
Quick View
4TMS
1
DPT Hard mask ACL
Quick View
1-hexene
1
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