APPLICATION | Precursor 2/2

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Applicaitons

Applicaitons

Elementary

Elementary

APPLICATIONS

Capaitor high-k

CpZr
TEMAZr

Metal high-k

DPT ULTO

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Gap fill SiO2

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Gate SiO2/SiN

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Capacitor electrode

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Barrier metal

TiCl4
TDMAT

Interconnection metal

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Contact metal

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DPT Hard mask SiON

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DPT Hard mask ACL

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