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Elementry
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Capacitor high-k
Metal gate high-k
DPT ULTO
Gap fill SiO2
Gate SiO2/SiN
Capacitor electrode
Barrier metal
Interconnection metal
Contact metal
DPT Hard mask SiON
DPT Hard mask ACL
ELEMENTRY
Al
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Ti
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Mo
Si
V
Co
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W
Ge
Pt
Ta
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MPA
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DMAH
1
Al
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