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ALL PRODUCTS
ALL PRODUCTS
APPLICATIONS
Capacitor high-k
Metal gate high-k
DPT ULTO
Gap fill SiO2
Gate SiO2/SiN
Capacitor electrode
Barrier metal
Interconnection metal
Contact metal
DPT Hard mask SiON
DPT Hard mask ACL
ELEMENTRY
Al
Hf
Ru
Ti
C
Mo
Si
V
Co
Ni
Sn
W
Ge
Pt
Ta
Zn
Zr
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RuEtCp2
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TDMAT
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TiCl4
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BTBAS
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TDMAS
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HCDS
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BDEAS
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SiCl4
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DIPAS
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TBTDETa
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Hf(OtBu)4
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Cp*Ti(OMe)3
1
2
3
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